Environmental Advantages

A Green Advantage Over Quartz and Silicon Carbide

SiFusion furnaceware offers a green advantage over quartz and silicon carbide alternatives, reducing the fab’s environmental footprint.

The cleaning process for furnace components is costly in terms of the investment in cleaning chemicals, environmental safeguards and dedicated facilities. Since SiFusion requires no routine cleaning, the fab uses less of the strong chemical cleaners such as hydrofluoric acid.

Fabs realize additional savings on the hazardous materials’ proper handling and disposal. Most governments’ emissions/environmental laws strictly regulate the use of the chemicals.

Additionally, SiFusion’s poly silicon material is environmentally friendly. The material will break down over hundreds of years to sand, without a negative impact on the environment.

Environmental pressures to eliminate strong acids:

• Fluoride pollution
• NOx
• Rising waste treatment costs