SiFusion Polysilicon Injectors

A Superior Replacement for Quartz and Silicon Carbide Fixtures

SiFusion polysilicon injectors serve as in-situ fixtures that deliver process gas into the diffusion furnace processes.

With high mechanical strength and no plastic deformation at temperatures up to 1350°C, SiFusion injectors are a superior replacement for current quartz and silicon carbide fixtures.

SiFusion injectors:

• Eliminate injector particle bursts
• Will not bend or break during operations
• Array configurable to customer specs
• Have long lifespan