Poly Silicon Liner Does Not Require Routine Cleaning
In conjunction with injectors and boats, SiFusion polysilicon liners are an essential element of the semiconductor furnace. Liners provide a uniform path for the gas flow from inlet to exhaust and act as a barrier preventing particles from the outer furnace tube from affecting product yields.
While quartz and silicon carbide liners typically require cleaning quarterly, a SiFusion poly silicon liner calls for no routine cleaning.
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