Key Advantages
SiFusion polysilicon furnaceware offers key advantages for different wafer manufacturing processes
High Temperature Processes
SiFusion furnaceware performs without deformities in demanding processes reaching temperatures up to
LPCVD Processes
SiFusion’s products generate essentially no particles and reduce costly routine cleaning and associated hazardous wastes.
Additional Processes
SiFusion is also ideal for other thermal operations, including the amorphous silicon process.
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