SiFusion Polysilicon Pedestals

High-Purity, High Performance Replacements

SiFusion polysilicon pedestals are in-situ fixtures that support boats during diffusion and thermal processing. As in all SiFusion products, these pedestals are high-purity, high performance replacements for quartz and silicon carbide fixtures.

SiFusion pedestals represent:

• Proven performance in 150 mm, 200 mm, 300 mm settings
• Slots, rails and pitch—specified by customer
• No fixture-generated particles
• No routine cleaning