Description
China Advanced Ceramic MeiVac model 0414-0004-1002 is a single fixed pocket 2cc electron beam evaporation source. e-Vap(R) 3kW electron beam evaporation sources are the ideal choice for research systems. The crucible size is carefully matched to the 3kW power supply to allow temperatures high enough to evaporate virtually any materials including metals, oxides, and even refractory metals. The small footprint makes them easy to integrate into just about any chamber.
Specifications
Maximum Power |
3kW – Crucible and material dependent
|
Operating Voltage |
Approximate -5kV
|
Beam Current |
Zero to 600mA
|
Water Flow |
0.62 gpm @ 65 psi
|
Flange |
2.75" CF
|
Mounting |
2.75″ CF flange with HV and Water feedthroughs included
|
Vacuum |
UHV to 2x10E-11 Torr
|