MeiVac System Process Solutions

MeiVac R&D and Process Improvements

Whether you need a tool for a 24/7 production fab or are still in the development phase, the MeiVac team will work with your researchers and engineers to maximize the process performance of a new or existing tool.

Highlights

• Process optimization to meet your specific needs
• Higher deposition rates>
• Film thickness uniformity optimization
• Film stoichiometry uniformity control and repeatability
• Process development to address new Applications
• New materials
• New sources and/or process chamber configurations
• Process development is not just limited to MeiVac’s standard systems. Our Process team works with customers to:
• Help optimize processes on their existing tools
• Design new tools that can meet their emerging requirements