Thin Film Coating Component Solutions
MeiVac is a leading manufacturer of vacuum process components, including evaporation sources, sputter sources, substrate heaters, and throttle valves. MeiVac thin film component products are the right choice for your process with a full range of standard and custom configurations.
VACUUM PROCESS WATER PUMPING
AQUA-LOK
Cryogenic Water Pump
Discerning customers demand better performance, using less resources for today’s product innovations. MeiVac introduces the AQUA-LOK Cryogenic Water Pump with exactly that thought in mind. Users can achieve up to 80% faster pump-down time using less energy and requiring a smaller cleanroom footprint than traditional compressor driven pumps.
PRESSURE CONTROL
Vari-Q
Throttle Valves & Accessories
The unique counter rotating vane design of the MeiVac Vari-Q throttle valve provides for superior linear control of your process pressure. These valves are highly repeatable and have proven to be a reliable component which often times will last longer than the systems where they are installed.
