Description
China Advanced Ceramic MeiVac 3.0″ diameter sample stage substrate heater is configured for sample applications. Like other members of the MeiVac substrate heater product line, it delivers superior uniformity and has been used for many R&D applications where reliability is critical. It is designed to operate under rigorous conditions and is both UHV and O2 compatible.
MeiVac sample substrate heaters are made of Haynes Metal and MUST be pre baked at atmosphere by the customer at or exceeding the desired operating temperature prior to use. Haynes metal heater blocks are compatible with the Silver Thermal Paste, which is sold as an accessory. MeiVac sample blocks can also be drilled and tapped for sample holding clips based on customer specification and is available at an additional charge.
MeiVac sample substrate heaters are made of Haynes Metal and MUST be pre baked at atmosphere by the customer at or exceeding the desired operating temperature prior to use. Haynes metal heater blocks are compatible with the Silver Thermal Paste, which is sold as an accessory. MeiVac sample blocks can also be drilled and tapped for sample holding clips based on customer specification and is available at an additional charge.
Features
- 3.0” Wafer Heater
- Maximum Temperature 950° C
- Oxygen Compatible
- UHV Compatible
- Excellent Temperature Uniformity
Dimensional Specifications
| Dimension | Inches |
|---|---|
| A | O 3.50 |
| B | 3.83 |
| C | 2.37 |
| D | 2.62 |
| E | 1.38 |
Operating Specifications (example at 1 atm pressure)
| Temperature Uniformity | +/- 1% |
|---|---|
| Temperature Repeatability | 12C |
| Ramp Time to 600C | 5 min. |
| Ramp Time to 950C | 13 min. |
| Cool-down Time to Room Temp | 40 min. |
| Max Current | 9 A |
| Max Voltage | 85V |
| Heater Resistance (typical) | 10 ohms |
| Power Supply | AC/DC |
