600W – 13.56MHz Complete RF Power Package, CE Marked

Part Number: SU-R601

Description

The RX01 series RF power supply package is a complete 13.56MHz RF package, including generator, AT auto-matching network, MC-2 control panel along with all cables and interlock connectors. These packages are conservatively rated and are CE marked, making them suitable for global RF sputter deposition applications. All units have been tested with MAK sources and are tuned for plug and play operation.

Specifications

Frequency

13.56 MHz

Output Power

600 watts

Forward Power Metering

+ /-1% Full Scale, +/-1% Reading

Output Power Stability

+/0.5% Long Term, +/-1%Watt

Harmonics

-50 dBc

Input Power

95 – 125 VAC or 190 – 264 VAC, 47-63 Hz

Output Connector

Type “N” Female

Interface Connectors

Serial: DB-9 Female; Analog: DB-25 Female

Metering

Metering

Cooling

Forced Air, 110 CFM (52 L/Sec.)

Dimensions

7 H x 9.5 W x 18.5 D (in.), 13.33 x 24.13 x 46.99 (cm)

Weight

33 lbs

MC-2 Control Panel Specifications

Input Power

98 – 125 / 196 -250 VAC Selectable, 47-63 Hz

Dimensions

3.5″ H x 9.5″ W x 12.9″D

I/O Connections

Match (DB15F), Analog (DB25F), RS232 (DB9F), Loop-Thru (DB25/M/F)

AT Match Network Specifications

AT-3

300 Watts, 20 Amps @ 2.5KV pk

Dimensions

5″ H x 9″ W x 15″ D

Cooling

Air-Convection

Tuning Range

1.5 to 35 Ohms – 100 to +75 Ohm

RF Conn.

Input: Type “N” Female / Output: Type “HN” Female

Ordering

Ordering Information for Model SU-R601

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