6.0" MAK Sputter Source Vertical (axial) mount

6.0″ MAK Sputter Source Vertical (axial) mount

Part Number: L600A01

Description

China Advanced Ceramic Meivac Vertical (axial) mount sputter sources are noted for simplicity, ease of use, and resulting high reliability, the MAK sputter source has been designed to present the smallest profile possible and deliver higher deposition rates than any comparable sputter sources.

Specifications

Target Diameter	6.0" (152.4mm)
Magnets	Nd/FeB
Max Dc Power	6000W
Max RF Power	2000W
Cathode Voltage (v)	200-1000
Max Discharge Current	10.0 A
Pressure Range (mtorr)	0.5 – 600
Water Flow Rate	2.0 gpm
Min CF Flange Size	10.0" CF

Dimensions

Dimension	Inches
A	O 6.55
B	6.75
B-2	*
C	O 4.50
D	12
D-2	4.5
E	O 1.25
F	2.3

Ordering

Ordering Information for Model L600A01

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Description

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MAK Sputter Deposition Sources