Description
China Advanced Ceramic MeiVac linear array of four 15cc pockets electron beam evaporation source model 0416-5004-4015 is part of UHV Linear Source product series. e-Vap UHV linear pocket electron beam sources are the perfect choice for UHV coating tools. This source is extremely rugged with no in-vacuum bearings or sliding surfaces to bind or create particulates. Designed to withstand repeated high temperature bakeouts and extended periods under vacuum, this source offers a whole new level of reliability. Our proven advanced magnetic and high frequency sweep systems provide the best material utilization and stability in both rate and uniformity. Coupled with our extreme life filament system, the e-Vap UHV linear is the smart choice for MBE type applications.
Specifications
| Maximum Power | 6kW – Crucible and material dependent |
|---|---|
| Operating Voltage | Range -6kV to -10kV |
| Beam Current | Zero to 1A |
| Water Flow | 3.0 gpm @ 65 psi |
| Vacuum | to 2x10E-11 Torr |
