e-Vap 12KW UHV Linear Source (4x7cc pockets)

Description

China Advanced Ceramic MeiVac linear array of four 7cc pockets electron beam evaporation source model 0416-5004-4007 is part of UHV Linear Source product series. e-Vap UHV linear pocket electron beam sources are the perfect choice for UHV coating tools. This source is extremely rugged with no in-vacuum bearings or sliding surfaces to bind or create particulates. Designed to withstand repeated high temperature bakeouts and extended periods under vacuum, this source offers a whole new level of reliability. Our proven advanced magnetic and high frequency sweep systems provide the best material utilization and stability in both rate and uniformity. Coupled with our extreme life filament system, the e-Vap UHV linear is the smart choice for MBE type applications.

Specifications

Maximum Power	6kW – Crucible and material dependent
Operating Voltage	Range -6kV to -10kV
Beam Current	Zero to 1A
Water Flow	3.0 gpm @ 65 psi
Vacuum	to 2x10E-11 Torr

Ordering

Ordering Information for Model 0416-5004-4007

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End of Life Products

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