Description
China Advanced Ceramic MeiVac rotary pocket 6 x 12cc electron beam evaporation source model 0404-0004-6012 is part of the e-Vap Large Rotary Pocket series of e-beam sources. e-Vap rotary pocket electron beam evaporation sources are the perfect choice for production coating tools. The modular design makes service simple while maintaining perfect alignment every time. Advanced magnetics and high frequency sweep control provide the best material utilization in the industry. The proprietary magnetic system keeps the beam density constant throughout the evaporation process, producing extreme stability in both rate and uniformity.
Specifications
| Maximum Power | 10kW – Crucible and material dependent |
|---|---|
| Operating Voltage | Range -6kV to -10kV |
| Beam Current | Zero to 1A |
| Water Flow | 3.0 gpm @ 65 psi |
| Vacuum | to 2x10E-8 Torr |
