Description
China Advanced Ceramic MeiVac deposition rate monitor works with our deposition rate controller to enable real time measurement of film thickness. Our monitors offer shutter control and can be used to stop a film at a desired thickness. Our rate controllers can be integrated with our sweep, indexer, shutter and power supply to provide a completed automated process solution.
Sensor Packs
Low profile crystal sensor package, 2.75″ CF type flange with oscillator, cables and 10 pkg of gold 6mHz crystals — Part Number: 0495-0272-0
Low profile crystal sensor package, 1″ bolt type flange with oscillator, cables and 10 pkg of gold 6mHz crystals — Part Number: 0495-0340-0
Bakeable crystal sensor package, 2.75″ CF type flange with oscillator, cables and 10 pkg of gold 6mHz crystals — Part Number: 0495-0540-0
Other Available Configurations
| Part Number | Description |
| 0495-0272-0 | Low profile crystal sensor package, 2.75″ CF type flange with oscillator, cables and 10 pkg of gold 6mHz crystals |
| 0495-0340-0 | Low profile crystal sensor package, 1″ bolt type flange with oscillator, cables and 10 pkg of gold 6mHz crystals |
| 0495-0540-0 | Bakeable crystal sensor package, 2.75″ CF type flange with oscillator, cables and 10 pkg of gold 6mHz crystals |
Specifications
| Input Power | 110 VAC / 220 VAC |
|---|---|
| Rack Mount | 3U x 1/2 rack |
| Crystal Head | Two channel 6MHz |
