Temescal Mount E-Beam Deposition Controllers

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A Thin Film Deposition Controller for Single and Multiple-layer Processes

Now get everthing you want in a thin film deposition controller for single and multiple-layer processes. The XTC/3 with patented ModeLock provides proven mode hop prevention for consistent quality. With the XTC/3 Thin Film Deposition Controller, you get highly accurate control of deposition rate and thickness, the capacity for virtually any number of layers, easy installation and extremely high reliability to ensure productivity.

  • Available in single-layer and multiple-layer models.
  • Patented ModeLock technology prevents film thickness errors caused by mode-hopping.
  • Supports Inficon Crystal 12TM, CrystalSix(R) and dual sensor automatic crystal switching for maximum productivity.
  • XTC/3M multiple-layer model supports up to 99 processes, 999 layers, 32 films, 2 sensors and 2 sources.
  • XTC/3S single-layer model supports up to 9 films, 2 sensors and 2 sources.
  • Easy-to-read TFT LCD graphics displays.
  • Films and processes can be assigned unique, descriptive names for easy retrieval.
  • Ethernet connection available
  • Free-standing (no computor necessary) or optional Windows(R) software for PC operation.
  • Plug-and-play replacement for Inficon XTC/2 controllers (limited to XTC/2 features and command set).

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Feature, Parameter, or Specification XTC/3S Single Layer XTC/3M Multiple Layer
Frequency change measurement resolution 0.028 Hz 0.028 Hz
Measurement interval .25 seconds .25 seconds
Thickness & rate resolution / measurement 0.034 Angstroms @Tooling/density = 100,
fundamental frequency = 6 MHz		 0.034 Angstroms @Tooling/density = 100,
fundamental frequency = 6 MHz
Measurement technology ModeLock ModeLock
Number of processes 1 99
Number of layers 1 999
Number of material programs (or Films) 9 32
Number of sensor inputs 2 standard 2 standard
CrystalSix / Crystal 12 sensor support Yes Yes
Support XTAL2 switch Yes Yes
Number of source outputs 2 standard 2 standard
Computer communications RS232 standard, Ethernet TCP/IP optional RS232 standard, Ethernet TCP/IP optional
Max RS232 baud rate 115.2 Kbaud 115.2 Kbaud
Automatic crystal switch Yes Yes
Number of relays 12 standard, not event assignable 12 standard, event assignable
Number of programmable relay functions 1 1
Functions per relay 1 1
Relay voltage rating 30VDC or 30VAC RMS or 42V peak at 2.5 Amps 30VDC or 30VAC RMS or 42V peak at 2.5 Amps
Number of inputs 8 TTL, 24VDC Max 8 TTL, 24VDC Max
Number of programmable input functions 1, not event assignable 1, event assignable
Number of recorder outputs 1 1
Manual power / hand held controller Yes Yes
Exhaust fan No exhaust fan No exhaust fan
Test mode Yes Yes
Shutter delay Yes Yes
Secondary tooling Yes Yes
Crystal starting frequency 6 MHz 6 MHz
Maximum allowed frequency shift 1.0 MHz 1.0 MHz
Case dimensions half rack, 2U high half rack, 2U high
Rate and thickness display resolution 0.1 A/s for 0.0 to 99.9 A/s, 1 A/s for 100 to 999 A/s, display thickness resolution = 1 A 0.1 A/s for 0.0 to 99.9 A/s, 1 A/s for 100 to 999 A/s, display thickness resolution = 1 A
Film select via inputs Yes No
User guide languages English, Chinese English, Chinese
Control loops PID PID
Software to operate from PC Yes Yes
Datalogging Yes Yes
Quality and stability function Yes Yes
Sample and hold (RateWatcher) Yes Yes
Crucible selection Yes Yes
Crucible feedback input Yes Yes
Select control voltage polarity Yes, +/- 2.5, 5, 10 Volts; 15-bit Resolution Yes, +/- 2.5, 5, 10 Volts; 15-bit Resolution
Program lock code Yes Yes
CrystalSix / Crystal 12 sensor support Yes Yes
Display with graphics Yes Yes
User labeled processes (cell phone style alphanumeric entry) No Yes
User Labeled Films (cell phone style alphanumeric entry) No Yes
Transfer sensor control Yes Yes
XTC/2 RS232 communications compatibility Yes (limited) Yes (limited)

XTC 3 Ordering Information

XTC/3 parts and accessories

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