Silicon Nitride Ceramic Material
Silicon Nitride Ceramics offer high thermal, shock, and impact resistance. With it’s exceptional thermal and shock resistance properties, combined with it’s high strength, Silicon Nitride is a leading choice for high-temperature, high-load applications.
Applications
- Semiconductor process equipment
- General industrial machinery
- Heat resistance parts
Properties
General properties | Main component purity (wt%) | 90 | |
Color | Gray | ||
Density (g/cm3) | 3.25 | ||
Water sbsorption (%) | 0 | ||
Mechanical properties | Bending strength (MPa) | 785 | |
Young’s modulus (GPa) | 285 | ||
Vickers hardness (GPa) | 16 | ||
Thermal properties | Max. operating temperature (°C) | 1200 | |
Coefficient of thermal expansion (1/°C×10-6) | RT~500°C | 3.5 | |
RT~800°C | 4.2 | ||
Coefficient of thermal conductivity (W/m×K) | 23 | ||
Thermal shock resistance ΔT (°C) | 650 | ||
Electrical properties | Volume resistivity | 25°C | 1016 |
300°C | 1014 | ||
500°C | 1011 | ||
800°C | 107 | ||
Dielectric constant | 10GHz | 8.3 | |
Dielectric loss (×10-4) | 25 | ||
Q factor (×104) | 0.04 | ||
Dielectric breakdown voltage (KV/mm) | 14 |
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