Silicon Nitride Ceramic Material

Silicon Nitride Ceramics offer high thermal, shock, and impact resistance. With it’s exceptional thermal and shock resistance properties, combined with it’s high strength, Silicon Nitride is a leading choice for high-temperature, high-load applications.

Applications

  • Semiconductor process equipment
  • General industrial machinery
  • Heat resistance parts

Silicon Nitride Ceramics Products Photo

Properties

General properties Main component purity (wt%) 90
Color Gray
Density (g/cm3) 3.25
Water sbsorption (%) 0
Mechanical properties Bending strength (MPa) 785
Young’s modulus (GPa) 285
Vickers hardness (GPa) 16
Thermal properties Max. operating temperature (°C) 1200
Coefficient of thermal expansion (1/°C×10-6) RT~500°C 3.5
RT~800°C 4.2
Coefficient of thermal conductivity (W/m×K) 23
Thermal shock resistance ΔT (°C) 650
Electrical properties Volume resistivity 25°C 1016
300°C 1014
500°C 1011
800°C 107
Dielectric constant 10GHz 8.3
Dielectric loss (×10-4) 25
Q factor (×104) 0.04
Dielectric breakdown voltage (KV/mm) 14

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