Silicon Carbide Ceramic Material
Silicon Carbide is a light, extremely hard, and corrosion resistant material which makes it a strong candidate for wear applications in the harshest environments. Silicon Carbide also offers other desirable properties such as excellent thermal conductivity and high young modulus.
Applications
- Semiconductor process equipment Parts
- General industrial machinery parts
- Abrasion resistance part
Properties
| General properties | Main component purity (wt%) | 97 | |
| Color | Black | ||
| Density (g/cm3) | 3.1 | ||
| Water absorption (%) | 0 | ||
| Mechanical properties | Bending strength (MPa) | 400 | |
| Young’s modulus (GPa) | 400 | ||
| Vickers hardness (GPa) | 20 | ||
| Thermal properties | Max. operating temperature (°C) | 1600 | |
| Coefficient of thermal expansion (1/°C×10-6) | RT~500°C | 3.9 | |
| RT~800°C | 4.3 | ||
| Coefficient of thermal conductivity (W/m×K) | 130 | ||
| Thermal shock resistance ΔT (°C) | 300 | ||
| Electrical properties | Volume resistivity | 25°C | 3×106 |
| 300°C | – | ||
| 500°C | – | ||
| 800°C | – | ||
| Dielectric Constant | 10GHz | – | |
| Dielectric loss (×10-4) | – | ||
| Q factor (×104) | – | ||
| Dielectric breakdown voltage (KV/mm) | – | ||
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